Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

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Detalles Bibliográficos
Publicado:	[2001]
Acceso en línea:	Connect to electronic version
Autor principal:	McNab, Sharee J. (Sharee Jane)
Materias:	Photolithography. Resolution (Optics) Masks (Electronics) Microfabrication.
Formato:	Tesis Libro

$Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /$

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Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

Internet

Macmillan Brown Library Storage, Thesis Collection, Request for use in MB Library

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