Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

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Bibliographic Details
Published:	[2001]
Online Access:	Connect to electronic version
Main Author:	McNab, Sharee J. (Sharee Jane)
Subjects:	Photolithography. Resolution (Optics) Masks (Electronics) Microfabrication.
Format:	Thesis Book

$Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /$

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Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

Online Access

Macmillan Brown Library Storage, Thesis Collection, Request for use in MB Library

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