Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.
Збережено в:
Опубліковано: |
[2001]
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Формат: | Дисертація Книга |
Фізичний опис: | xxvi, 196 p. : ill. (some col.) ; 30 cm. |
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Примітки: | Typescript (photocopy). "5 March 2001." Thesis (Ph. D.)--University of Canterbury, 2001. Bib#: 769396 |
Бібліографія: | Includes bibliographical references (p. [185]-196). |
Мова: | English |
Bib#: | 769396 |