Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

Sparad:
Bibliografiska uppgifter
Publicerad: [2001]
Länkar:
Huvudupphovsman:
McNab, Sharee J. (Sharee Jane)
Ämnen:
Photolithography.
Resolution (Optics)
Masks (Electronics)
Microfabrication.
Materialtyp: Lärdomsprov Bok
Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /
Beskrivning
Fysisk beskrivning:xxvi, 196 p. : ill. (some col.) ; 30 cm.
Anmärkningar:Typescript (photocopy).
"5 March 2001."
Thesis (Ph. D.)--University of Canterbury, 2001.
Bib#: 769396
Bibliografi:Includes bibliographical references (p. [185]-196).
Språk:English
Bib#:769396

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