Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

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Bibliografski detalji
Izdano: [2001]
Online pristup:
Glavni autor:
McNab, Sharee J. (Sharee Jane)
Teme:
Photolithography.
Resolution (Optics)
Masks (Electronics)
Microfabrication.
Format: Disertacija Knjiga
Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /
Opis
Opis fizičkog objekta:xxvi, 196 p. : ill. (some col.) ; 30 cm.
Bilješke:Typescript (photocopy).
"5 March 2001."
Thesis (Ph. D.)--University of Canterbury, 2001.
Bib#: 769396
Bibliografija:Includes bibliographical references (p. [185]-196).
Jezik:English
Bib#:769396

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