Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

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書目詳細資料
出版:	[2001]
在線閱讀:	Connect to electronic version
主要作者:	McNab, Sharee J. (Sharee Jane)
主題:	Photolithography. Resolution (Optics) Masks (Electronics) Microfabrication.
格式:	Thesis 圖書

$Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /$

實物特徵
實物描述:	xxvi, 196 p. : ill. (some col.) ; 30 cm.
提示:	Typescript (photocopy). "5 March 2001." Thesis (Ph. D.)--University of Canterbury, 2001. Bib#: 769396
參考書目:	Includes bibliographical references (p. [185]-196).
語言:	English
Bib#:	769396

Evanescent near-field optical lithography : overcoming the diffraction limit : a thesis presented for the degree of Doctor of Philosophy in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand / Sharee J. McNab.

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