Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller.
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| Published: |
Chichester, England ; Hoboken, NJ :
J. Wiley & Sons,
c2008.
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| Series: | Wiley microsystem and nanotechnology series.
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| Format: | Book |
Online Access
Publisher descriptionTable of contents only
EPS Library, Level 3
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