Principles of lithography / Harry J. Levinson.

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Bibliographic Details
Edition:	2nd ed.
Published:	Bellingham, WA : SPIE Press, c2005.
Online Access:	Table of contents
Main Author:	Levinson, Harry J.
Series:	SPIE monograph ; PM146.
Subjects:	Integrated circuits > Design and construction. Microlithography
Format:	Book

Online Access

Table of contents

Holdings details from EPS Library, Level 3
Call Number Copy Loan Type Status Request
TK 7874 .L665 2005 AU15400700B For loan Available now Request this copy