Photonics West 2008 [electronic resource] : MOEMS, MEMS, micro and nanofabrication : 19-24 January 2008, San Jose, California, USA.
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Edition: | Single-user ed. |
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Published: |
Bellingham, Wash. :
SPIE,
c2008.
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Corporate Author: | |
Series: | Proceedings of SPIE on CD-ROM ;
v. 6882-6888. |
Subjects: | |
Format: | Electronic Software eBook |
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