Photonics West 2008 [electronic resource] : MOEMS, MEMS, micro and nanofabrication : 19-24 January 2008, San Jose, California, USA.

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Bibliographic Details
Edition:Single-user ed.
Published: Bellingham, Wash. : SPIE, c2008.
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Series:Proceedings of SPIE on CD-ROM ; v. 6882-6888.
Format: Electronic Software eBook

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CD-ROM 09/22 AU16663403B
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