4 results Refine Results
  1. 1
    by Mack, Chris A.
    Published 2007
    Subjects
    Table of contents only
    Publisher description
    Contributor biographical information
    Book
    Save to List
    Saved in:
    Fundamental principles of optical lithography : the science of microfabrication /
  2. 2
    by Nonogaki, Saburo, 1930-
    Published 1998
    Subjects
    Book
    Save to List
    Saved in:
    Microlithography fundamentals in semiconductor devices and fabrication technology /
  3. 3
    Published 1998
    Subjects “...Microlithography Industrial applications....”
    Book
    Save to List
    Saved in:
    Microlithography : science and technology /
  4. 4
    Published 2008
    Subjects
    Book
    Save to List
    Saved in:
    Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA /

Search Tools: