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  1. 1
    per Mack, Chris A.
    Publicat 2007
    Table of contents only
    Publisher description
    Contributor biographical information
    Llibre
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    Guardat en:
    Fundamental principles of optical lithography : the science of microfabrication /
  2. 2
    Publicat 2008
    “...Proceedings of SPIE--the International Society for Optical Engineering ;...”
    Llibre
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    Guardat en:
    Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA /

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