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  1. 1
    出版 2008
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    Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /
  2. 2
    由 Lyshevski, Sergey Edward
    出版 2001
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    MEMS and NEMS : systems, devices, and structures /
  3. 3
    由 Banks, Danny
    出版 2006
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    Microengineering, MEMS, and interfacing : a practical guide /

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