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  1. 1
    Publicado 2008
    Libro
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    Gardado en:
    Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /
  2. 2
    por Lyshevski, Sergey Edward
    Publicado 2001
    Libro
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    Gardado en:
    MEMS and NEMS : systems, devices, and structures /
  3. 3
    por Banks, Danny
    Publicado 2006
    Libro
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    Gardado en:
    Microengineering, MEMS, and interfacing : a practical guide /

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