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  1. 1
    by Madou, Marc J.
    Published 1997
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    Fundamentals of microfabrication /
  2. 2
    by Madou, Marc J.
    Published 2012
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    Fundamentals of microfabrication and nanotechnology /
  3. 3
    by Madou, Marc J.
    Published 2002
    Book
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    Fundamentals of microfabrication : the science of miniaturization /

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