6 results Refine Results
  1. 1
    Published 2008
    Electronic Software eBook
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    Photonics West 2008 MOEMS, MEMS, micro and nanofabrication : 19-24 January 2008, San Jose, California, USA.
  2. 2
    by Banks, Danny
    Published 2006
    Book
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    Microengineering, MEMS, and interfacing : a practical guide /
  3. 3
    by Liu, Chang, Ph.D
    Published 2006
    Book
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    Foundations of MEMS /
  4. 4
    Published 2008
    Book
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    Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /
  5. 5
    by Franssila, Sami
    Published 2004
    Book
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    Introduction to microfabrication /
  6. 6
    by Liu, Chang, Ph.D
    Published 2012
    Book
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    Saved in:
    Foundations of MEMS /

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