5 results Refine Results
  1. 1
    by Franssila, Sami
    Published 2004
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    Introduction to microfabrication /
  2. 2
    by Maluf, Nadim
    Published 2004
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    An introduction to microelectromechanical systems engineering /
  3. 3
    by Gerlach, Gerald
    Published 2008
    Publisher description
    Table of contents only
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    Introduction to microsystem technology : a guide for students /
  4. 4
    by Liu, Chang, Ph.D
    Published 2012
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    Foundations of MEMS /
  5. 5
    Published 2008
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    Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia /

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