Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride : a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury / by Suk Ing Liem.

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Bibliographic Details
Published:	2003.
Online Access:	Connect to electronic version
Main Author:	Liem, Suk Ing
Subjects:	Gallium nitride > Defects. Gallium nitride > Etching. Ion beam lithography Photoluminescence.
Format:	Thesis Book

Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride : a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury /

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