Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride : a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury / by Suk Ing Liem.

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Bibliographic Details
Published: 2003.
Online Access:
Main Author:
Liem, Suk Ing
Subjects:
Gallium nitride > Defects.
Gallium nitride > Etching.
Ion beam lithography
Photoluminescence.
Format: Thesis Book
Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride : a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury /
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Thesis (Physics) AU12227714B
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