Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride : a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury / by Suk Ing Liem.

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Published: 2003.
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Format: Thesis Book

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LEADER 00000nam a2200000 a 4500
001 918413
005 20140225123800.0
008 050610s2003 nz a f bm 000 0 eng d
035 |a (OCoLC)156759080 
040 |a CU  |c CU 
097 |3 Bib#:  |a 918413 
100 1 |a Liem, Suk Ing. 
245 1 0 |a Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride :  |b a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury /  |c by Suk Ing Liem. 
260 |c 2003. 
300 |a x, 207 p. :  |b ill. (some col.) ;  |c 30 cm. 
500 |a Typescript (photocopy). 
502 |a Thesis (Ph. D.)--University of Canterbury, 2003. 
504 |a Includes bibliographical references (p. 201-207). 
650 0 |a Gallium nitride  |x Defects. 
650 0 |a Gallium nitride  |x Etching. 
650 0 |a Ion beam lithography 
650 0 |a Photoluminescence. 
856 4 1 |u http://hdl.handle.net/10092/5706  |y Connect to electronic version  |t 0 
991 |a 2005-06-09 
992 |a Created by julew, 09/06/2005. Updated by alte, 25/02/2014. 
999 f f |i a754f11d-f767-58bb-8303-2205aef5442a  |s f838871f-1c5a-5f7b-9590-3b1df10c0dbb  |t 0 
952 f f |p Library use only  |a University Of Canterbury  |b Storage  |c MB Warehouse  |d Macmillan Brown Library Storage, Thesis Collection, Request for use in MB Library  |t 0  |e Thesis (Physics)  |h Local  |i Thesis  |m AU12227714B