Influence of ion energy on the reactive ion etching induced optical damage and annealing of gallium nitride : a thesis submitted in partial fulfilment of the requirements for the degree of Doctor of Philosophy in Physics in the University of Canterbury / by Suk Ing Liem.
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2003.
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| Format: | Thesis Book |
| Physical Description: | x, 207 p. : ill. (some col.) ; 30 cm. |
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| Notes: | Typescript (photocopy). Thesis (Ph. D.)--University of Canterbury, 2003. Bib#: 918413 |
| Bibliography: | Includes bibliographical references (p. 201-207). |
| Language: | English |
| Bib#: | 918413 |
