Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.

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Bibliographic Details
Published: New York : Plenum Press, c1988.
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Series:Microdevices
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Format: Book

EPS Library, Level 3

Holdings details from EPS Library, Level 3
Call Number Copy Loan Type Status Request
TK 7871.85 .M837 1988 AU11397802B
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