Ion implantation technology--96 [electronic resource] : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996 / editors Emi Ishidida [sic] ... [et al.].
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Piscataway, N.J. :
Institute of Electrical and Electronics Engineers,
c 1996.
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| Format: | Electronic Conference Proceeding eBook |
