Three-dimensional patterning using ultraviolet curable nanoimprint lithography : a thesis submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Electrical and Computer Engineering at the University of Canterbury, Christchurch, New Zealand / by Khairudin Mohamed.

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Bibliographic Details
Published: [2009]
Online Access:
Main Author:
Mohamed, Khairudin
Subjects:
Microlithography
Nanostructured materials.
Nanotechnology.
Nanoelectronics
Format: Thesis Book
Three-dimensional patterning using ultraviolet curable nanoimprint lithography : a thesis submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Electrical and Computer Engineering at the University of Canterbury, Christchurch, New Zealand /
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Thesis (Electrical Engineering) AU17419743B
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