Emerging lithographic technologies XII : 26-28 February 2008, San Jose, California, USA / Frank M. Schellenberg, editor ; sponsored by SPIE ; cooperating organization, SEMATECH (USA).
محفوظ في:
منشور في: |
Bellingham, Wash. :
SPIE,
c2008.
|
---|---|
مؤلفون مشاركون: | |
مؤلفون آخرون: | |
سلاسل: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6921. |
الموضوعات: | |
التنسيق: | كتاب |
مواد مشابهة
-
Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA /
منشور في: (2008) -
Nanostructure engineering by means of nanoimprint lithography : a thesis submitted in partial fulfilment of the requirements for the degree of Master of Engineering in Electrical and Electronic Engineering in the University of Canterbury /
حسب: Jayatissa, C. A. N. Wasantha (Canangama Arachchige Nandan Wasantha)
منشور في: (2003) -
Resist deformation in nanoimprint lithography : a thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering in the Electrical and Computer Engineering at the University of Canterbury /
حسب: Mohamed, Khairudin
منشور في: (2005) -
Multilevel nanoengineering for imprint lithography : a thesis submitted in partial fulfilment of the requirements for the degree of Master of Engineering in Electrical and Electronic Engineering at the University of Canterbury, Christchurch, New Zealand /
حسب: Konijn, Mark
منشور في: (2005) -
Proceedings of the 5th conference on X-ray analytical methods.
منشور في: (1966)